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The Confocal Sensor principle is based on a harmonically vibrating scanning objective. A light beam with
small spot is emitted onto the surface of the workpiece and then reflected back through the objective to a
detector. The light energy on the detector shows a maximum if the spot is focussed on the surface. With
increasing defocusing the light energy decreases. The electronic of the sensor (controller) grasps the time
of the signal maximum and calculates the corresponding measurement value.

 
         



Technical Data

                                                             Sensor

Measurement range:                [µm]            1000
Resolution vertical:                   [nm]           100
Reproducibility:                        [nm]           < 30
Working distance:                    [mm]           4
Spot diameter:                         [µm]            1.7
Tilt angle max.:                         [°]             ± 30
Sampling rate max.:                [kHz]           1


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